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And just to be clear the optics are not at all trivial when you're talking about EUV and the precisions required

I'm not sure if the lenses are even transparent in the visible range but I wouldn't be surprised if they weren't.



Lenses aren't available for EUV, they can only use quite lossy mirrors.


Weirdly enough, ASML has more than 80% market share even though Canon and Nikon also make DUV equipment.




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